设备尺寸

Device size

长421 mm*宽364 mm*高815 mm

L421mm*W364mm²H815mm

整备质量

Curb weigh

40不千克(依配置决定)

40kg(Decide by config)

额定电压

Rated voltage

DC24V

额定功率

Rated voltage

60W

主体材质

Body material

铝合金、不锈钢(SUS 304)

Aluminum、Stainless steel (SUS304)T

适用载具类型

Applicable carier types

150/200mm POD(SEMI)

噪声

Acoustic Noise

≤60分贝

≤60dB

通讯接口

Comm interface

串口EIA-RS232C,Paralle I/O

Serial EIA-RS232C,Paralle V/O

通讯协议

Comm protocol

HEX、SECS

洁净度

Cleanliness

Class 1@0.1μm

晶圆盒界面

Wafer boxinterface

SEMI E19.4

载入循环

Loadloop

负压：-80 kPa(06气体接口)

VAC:-80kPa(06 air tube)

移出循环

Removal loop

正压：0.5~0.6 MPa(06气体接口)

CDA:0.5~0.6 MPa(06 air tube)

选配选项

Matching options

150/200mm开盒检测传感器配置

150/200mm Open box to detect sensor configuration

E84电控模组选配

E84 Electric control module selection

通讯协议选择HEX/SECS

Communication protocol module selection HEX/SECS

ID读写装置选配RFID

ID read/write device with RFID odule or IRLink